피에조 마이크로미터 헤드 SP83-28um

Model

SP83.X25S

SP83.X25K

Units

Active axes

X

See S

Sensor

SGS

–

Nominal travel range

（0 ~+120 V）

20

See S

µm±20%

Max. travel range

（-20 ~+150 V）

28

See S

µm±20%

Travel range（micrometer drive）

13

See S

mm

Resolution

1.5

0.5

nm

Resolution（micrometer drive）

10

See S

µm

Closed-loop linearity  

0.2

–

%F.S.

Repeatability

0.1

–

%F.S.

Push/pull force capacity in motion direction

20/5

See S

N

Stiffness 

2

See S

N/mm±20%

Electrical capacitance 

1.8

See S

μF±20%

Material 

Steel

See S

Weight 

0.1

See S

Kg±5%

Cable length 

1.5

See S

m±10mm