피에조 마이크로미터 헤드 SP84-110um

Model

SP84.X100S

SP84.X100K

Units

Active axes

X

X

Travel range(micrometer drive)

13

See S

mm

Resolution(micrometer drive)

10

See S

μm

PZT nominal travel range

(0~120V)

80

See S

μm±20%

PZT max. travel range

(0-150V)

110

See S

μm±20%

Sensor

SGS

–

PZT resolution

7

2.5

nm

Closed-loop linearity

0.15

–

%F.S.

Repeatability

0.05

–

%F.S.

Push/pull force capacity in motion direction 

16

See S

N

Stiffness

1

See S

N/μm±20%

Electrical capacitance

1.8

See S

μF±20%

Material

Steel, Aluminum

See S

Weight

0.1

See S

kg±5%

Cable length

1.5

See S

m±10mm