SP63XY PIEZO STAGE, XY DIRECTION, STROKE 8 ΜM
설명
SP63.XY Technical Data
SP63.X7S: Closed Loop
SP63.X7K: Open Loop
|
Model |
SP63.XY7S |
SP63.XY7K |
Units |
|
Active axes |
X、Y |
See S |
|
|
Sensor |
SGS |
– |
|
|
Nominal travel range （0 ~+120 V） |
5.5/axis |
See S |
µm±20% |
|
Max. travel range （-20~+150 V） |
8/axis |
See S |
µm±20% |
|
Resolution |
0.2 |
0.1 |
nm |
|
Closed-loop linearity |
0.2 |
– |
%F.S. |
|
Repeatability |
0.1 |
– |
%F.S. |
|
Push/pull force capacity |
8/2 |
See S |
N |
|
Stiffness |
X1.2/Y1.4 |
See S |
N/µm±20% |
|
Load capacity |
500 |
See S |
g |
|
Electrical capacitance |
0.8/axis |
See S |
μF±20% |
|
Unloaded resonant frequency |
X1.3/Y1.9 |
See S |
kHz±20% |
|
Material |
Aluminum |
See S |
|
|
Weight |
120 |
See S |
g±5% |
|
Cable length |
1.5 |
See S |
m±10mm |
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