SXP-62X Piezo Stage, X Direction, Stroke to 17/34/68 µm
설명
XP-62X Technical Data
SXP-620.S, SXP-621.S, SXP-623.S: Closed Loop
SXP-620.K, SXP-621.K, SXP-623.K: Open Loop
|
Model |
SXP-620.S |
SXP-621.S |
SXP-623.S |
SXP-620.K |
Units |
|
Active axes |
X |
X |
X |
X |
|
|
Sensor |
SGS |
SGS |
SGS |
– |
|
|
Nominal travel range（0~120V） |
12 |
24 |
48 |
See S |
μm±20% |
|
Max. travel range （-20~150V） |
17 |
34 |
68 |
See S |
μm±20% |
|
Resolution |
0.5 |
1 |
2 |
0.1/0.2/0.3 |
nm |
|
Closed-loop linearity |
0.1 |
0.15 |
0.2 |
– |
%F.S. |
|
Repeatability |
0.05 |
0.1 |
0.15 |
– |
%F.S. |
|
Stiffness |
40 |
20 |
10 |
See S |
N/μm±20% |
|
Unloaded resonant frequency |
4.2 |
3.3 |
2.5 |
See S |
kHz±20% |
|
Push/pull force capacity in motion direction |
480/160 |
480/160 |
480/160 |
See S |
N |
|
Load capacity |
10 |
10 |
10 |
See S |
kg |
|
Electrical capacitance |
1.8 |
3.6 |
7.2 |
See S |
μF±20% |
|
Material |
Aluminum |
Aluminum |
Aluminum |
See S |
|
|
Weight |
150 |
250 |
450 |
See S |
g±5% |
|
Cable length |
1.5 |
1.5 |
1.5 |
See S |
m±10mm |
|
Max driving voltage -20V~150V；Recommended voltage 0~120V for long-time operation for lifetime. |
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